دراسة الانتثار في الأفلام الرقيقة الثنائية بطريقة تبعثر رزرفورد المرتد

Authors

  • مالك الرحية

Abstract

استعمل تبعثر رزرفورد المرتد (RBS) لدراسة الانتثار المتبادل في أفلام    Ti/Mg الرقيقة.

تم تحضير الأفلام من طبقتين مؤلفتين من التيتانيوم والمغنيزيوم, وذلك بطريفة التبخير في الخلاء من خلال توضع طبقة من التيتان فوق طبقة من المغنيزيوم على ركازة من السيليكون المطلية بطبقة من الكربون, وذلك ليتثنى لنا فصل خطوط RBS البيانية الناتجة لمختلف العناصر. كما تم إنجاز المعالجات الحرارية بطريقتين :

1-                      تحمية حرارية تقليدية (CTA).

2-                       تحمية حرارية سريعة(RTP).

ذلك ابتداء من 450 ، وقد لاحظنا تشكُل مركب Ti-Mg عند السطح الفاصل بين المعدنين (السطح البيني) للفيلم Ti/Mg, وذلك من أجل درجات حرارة تقع ضمن المجال ((450-650 0C . وتمت أيضاً معالجة خطوط RBS البيانية باستخدام برنامج RUMP.

 

Rutherford Backscattering Spectroscopy (RBS) is used to study interdiffusion in Ti/Mg thin film system induced by thermal annealing. Bilayer films of Titanium and Aluminum were prepared by vacuum evaporation through sequential deposition of Ti and Mg on silicon substrates covered with a carbon layer.

The thermal treatment was effected by two techniques:

 

-   Classical Thermal Annealing (CTA).

-   Rapid thermal Processing (RTP) .

 

Up to 4500C no reaction has occurred, but a Ti/Mg compound was formed at the interface of a Ti/Mg for annealing at temperatures in range  450-6500C. The RBS spectra were analyzed using the RUMP simulation code.

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Published

2018-12-04

How to Cite

1.
الرحية م. دراسة الانتثار في الأفلام الرقيقة الثنائية بطريقة تبعثر رزرفورد المرتد. TUJ-BA [Internet]. 2018Dec.4 [cited 2025Apr.10];28(1). Available from: https://journal.tishreen.edu.sy/index.php/bassnc/article/view/4983

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Vol. 28 No. 1 (2006): العلوم الأساسية

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