دراسة الانتشار المتبادل في الأفلام الرقيقة Pd,Ti/Au,Ti/Pt,Ti/Mg/Ti

Authors

  • سمير غالية

Abstract

Rutherford Backscattering spectroscopy (RBS) is used to study the interdiffusion in Ti/P, Ti/Au, Ti/Pt, and Ti/Mg thin film systems induced by thermal annealing. Bilayer films of Titanium, Palladium, Gold, Platinuium and Magnesium were prepared in vacuum by evaporating sequential deposition Pd and Au, Pt, Mg on Ti in Air, are compared with vacuum, annealing enhances interdiffusion in the Ti/Au. The compound TiAu4 could be identified by TEM. However, neither backscattering nor electron diffraction indicate compound formation in  Ti/Pd system. The RBS spectra were analysed using the RUMP simulation code. The activation energy for this reaction was 1.14 ev.

استخدمت طريقة الاستطارة الخلفية لرذرفورد RBS لدراسة الانتشار المتبادل في الأفلام الرقيقة التالية:  Ti/Pd;Ti/Au;Ti/Pt;Ti/Mg. التي حصلنا عليها بطريقة التحمية الحرارية.

حضرت أفلام من طبقتين وهما التيتانيوم وكلٍِ من البلاد يوم،الذهب، بلاتينيوم والمغنيزيوم من جهة أخرى، وذلك بتبخيرها في الخلاء بتوضع  التيتان على العناصر المذكورة أعلاه على التوالي:  بإجراء عملية مقارنة بين التبخير في الهواء والتبخير في الخلاء، أمكن اكتشاف تنشيط الانتشار المتبادل في أفلام Ti/Au. يمكننا التأكد من هوية المركب المتكون من Ti/Au4 بواسطة حيود الالكترونات  TEM. دلت نتائج طريقة الاستطارة الخلفية وطريقة حيود الإلكترونات على عدم تشكل أي مركب في الجملة Ti/P.  حللت أطيـافRBS البيـانيـة باسـتخـدام بـرنامج "RUMP" وقـد وجـد أن طاقـة تنشـيط التـفـاعـل هي ev 1.14.

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Published

2018-12-02

How to Cite

1.
غالية س. دراسة الانتشار المتبادل في الأفلام الرقيقة Pd,Ti/Au,Ti/Pt,Ti/Mg/Ti. TUJ-BA [Internet]. 2018Dec.2 [cited 2024May13];25(1). Available from: https://journal.tishreen.edu.sy/index.php/bassnc/article/view/4921

Issue

Vol. 25 No. 1 (2003): العلوم الأساسية

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